Evaluation of multigrid as a solver for stress analysis problems in semiconductor process simulation

S Mijalkovic

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific

Original language	Undefined/Unknown
Title of host publication	Multigrid methods VI [Lecture notes in computational science and engineering 14]
Editors	E Dick, K Riemslagh, J Vierendeels
Place of Publication	Berlin
Publisher	Springer
Pages	179-185
ISBN (Print)	3-540-67157-9
Publication status	Published - 2000

Keywords

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isbn = "3-540-67157-9",

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booktitle = "Multigrid methods VI [Lecture notes in computational science and engineering 14]",

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Evaluation of multigrid as a solver for stress analysis problems in semiconductor process simulation. / Mijalkovic, S.
Multigrid methods VI [Lecture notes in computational science and engineering 14]. ed. / E Dick; K Riemslagh; J Vierendeels. Berlin: Springer, 2000. p. 179-185.

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific

TY - CHAP

T1 - Evaluation of multigrid as a solver for stress analysis problems in semiconductor process simulation

AU - Mijalkovic, S

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Chapter

SN - 3-540-67157-9

SP - 179

EP - 185

BT - Multigrid methods VI [Lecture notes in computational science and engineering 14]

A2 - E Dick, null

A2 - K Riemslagh, null

A2 - J Vierendeels, null

PB - Springer

CY - Berlin

ER -