Evaporation based micro pump integrated into a scanning force microscope probe

FCA Heuck, T Hug, T Akiyama, PLTM Frederix, U Staufer

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1302-1305
Number of pages4
JournalMicroelectronic Engineering
Volume85
Publication statusPublished - 2008

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