Evaporation based micro pump integrated into a scanning force microscope probe

FCA Heuck, T Hug, T Akiyama, PLTM Frederix, U Staufer

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1302-1305
Number of pages	4
Journal	Microelectronic Engineering
Volume	85
Publication status	Published - 2008

Niet eerder opgevoerd

Keywords

@article{fe826ac7b4754a6c92446596632f5a3b,

title = "Evaporation based micro pump integrated into a scanning force microscope probe",

keywords = "journal letters, notes, etc., Geen BTA classificatie",

author = "FCA Heuck and T Hug and T Akiyama and PLTM Frederix and U Staufer",

note = "Niet eerder opgevoerd",

year = "2008",

language = "Undefined/Unknown",

volume = "85",

pages = "1302--1305",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}

TY - JOUR

T1 - Evaporation based micro pump integrated into a scanning force microscope probe

AU - Heuck, FCA

AU - Hug, T

AU - Akiyama, T

AU - Frederix, PLTM

AU - Staufer, U

N1 - Niet eerder opgevoerd

PY - 2008

Y1 - 2008

KW - journal letters, notes, etc.

KW - Geen BTA classificatie

M3 - Article

VL - 85

SP - 1302

EP - 1305

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -