Excimer laser annealing for ultrashallow junctions and contacts

V Gonda

    Research output: Thesis › Dissertation (TU Delft)

    Original languageUndefined/Unknown
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Nanver, Lis, Promotor
    Award date1 Dec 2008
    Place of PublicationDelft
    Publication statusPublished - 2008

    Keywords

    • Diss. prom. aan TU Delft

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