Experimental evaluation of robust-control-relevance: a confrontation with a next-generation wafer stage

RAP van Herpen, T Oomen, M van de Wal, OH Bosgra

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Title of host publicationAmerican Control Conference 2010
EditorsG.Y. Masada
Place of PublicationBaltimore, USA
PublisherACC
Pages3493-3499
Number of pages7
ISBN (Print)978-1-4244-7425-7
Publication statusPublished - 2010
EventAmerican Control Conference 2010, Baltimore, USA - Baltimore, USA
Duration: 30 Jun 20102 Jul 2010

Publication series

Name
PublisherACC

Conference

ConferenceAmerican Control Conference 2010, Baltimore, USA
Period30/06/102/07/10

Keywords

  • Conf.proc. > 3 pag

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