@inproceedings{0dcf64af9b0e48c398d3dfc862d23eca,
title = "Experimental evaluation of robust-control-relevance: a confrontation with a next-generation wafer stage",
keywords = "Conf.proc. > 3 pag",
author = "{van Herpen}, RAP and T Oomen and {van de Wal}, M and OH Bosgra",
year = "2010",
language = "English",
isbn = "978-1-4244-7425-7",
publisher = "ACC",
pages = "3493--3499",
editor = "G.Y. Masada",
booktitle = "American Control Conference 2010",
note = "American Control Conference 2010, Baltimore, USA ; Conference date: 30-06-2010 Through 02-07-2010",
}