Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 2063-2072 |
Number of pages | 10 |
Journal | Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures |
Volume | 16 |
Issue number | 4 |
Publication status | Published - 1998 |
Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 2063-2072 |
Number of pages | 10 |
Journal | Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures |
Volume | 16 |
Issue number | 4 |
Publication status | Published - 1998 |