| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 2063-2072 |
| Number of pages | 10 |
| Journal | Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures |
| Volume | 16 |
| Issue number | 4 |
| Publication status | Published - 1998 |
| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 2063-2072 |
| Number of pages | 10 |
| Journal | Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures |
| Volume | 16 |
| Issue number | 4 |
| Publication status | Published - 1998 |