Experimental evalution of a dual-axis ultra-precision positioning stage for probe studies

ES Buice, ST Smith, RJ Hocken

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publication10th anniversary international conference of the european society for precision engineering and nanotechnology
Editors s.n.
Publishers.n.
Pages1-4
Number of pages4
ISBN (Print)geen
Publication statusPublished - 2008

Publication series

Name
Publishers.n.

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this

Buice, ES., Smith, ST., & Hocken, RJ. (2008). Experimental evalution of a dual-axis ultra-precision positioning stage for probe studies. In s.n. (Ed.), 10th anniversary international conference of the european society for precision engineering and nanotechnology (pp. 1-4). s.n..