Experimental evalution of a dual-axis ultra-precision positioning stage for probe studies

ES Buice, ST Smith, RJ Hocken

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	10th anniversary international conference of the european society for precision engineering and nanotechnology
Editors	s.n.
Publisher	s.n.
Pages	1-4
Number of pages	4
ISBN (Print)	geen
Publication status	Published - 2008

Name
Publisher	s.n.

Keywords

@inproceedings{6dab47aef1c341e9908edaf3d8cd4a4c,

title = "Experimental evalution of a dual-axis ultra-precision positioning stage for probe studies",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "ES Buice and ST Smith and RJ Hocken",

year = "2008",

language = "Undefined/Unknown",

isbn = "geen",

publisher = "s.n.",

pages = "1--4",

editor = "s.n.",

booktitle = "10th anniversary international conference of the european society for precision engineering and nanotechnology",

}

Experimental evalution of a dual-axis ultra-precision positioning stage for probe studies. / Buice, ES; Smith, ST; Hocken, RJ.
10th anniversary international conference of the european society for precision engineering and nanotechnology. ed. / s.n. s.n., 2008. p. 1-4.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Experimental evalution of a dual-axis ultra-precision positioning stage for probe studies

AU - Buice, ES

AU - Smith, ST

AU - Hocken, RJ

PY - 2008

Y1 - 2008

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - geen

SP - 1

EP - 4

BT - 10th anniversary international conference of the european society for precision engineering and nanotechnology

A2 - s.n., null

PB - s.n.

ER -