Experimental study of a shearing interferometer concept of at-wavelenght characterisation of EUV optics.

PE Hegeman, XMT Christmann, HM Visser, JJM Braat

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{13775f83a4f741b5b34174b721638753,

title = "Experimental study of a shearing interferometer concept of at-wavelenght characterisation of EUV optics.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PE Hegeman and XMT Christmann and HM Visser and JJM Braat",

year = "2001",

language = "Undefined/Unknown",

volume = "40",

pages = "4526--4533",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "The Optical Society",

}