Experimental study of a shearing interferometer concept of at-wavelenght characterisation of EUV optics.

PE Hegeman, XMT Christmann, HM Visser, JJM Braat

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)4526-4533
Number of pages8
JournalApplied Optics
Volume40
Publication statusPublished - 2001

Keywords

  • ZX Int.klas.verslagjaar < 2002

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