Experimental verification of Rarefied Gas Squeezed-Film Damping Models used in MEMS (U-SP-2-I-ICT)

L Mol; RF Wolffenbuttel; LA Rocha; E Cretu

Experimental verification of Rarefied Gas Squeezed-Film Damping Models used in MEMS (U-SP-2-I-ICT)

L Mol, RF Wolffenbuttel, LA Rocha, E Cretu

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of 2006 International Mechanical Engineering Congress and Exposition
Editors	s.n.
Place of Publication	s.l.
Publisher	s.l.
Pages	1-4
Number of pages	4
ISBN (Print)	0-7918-3790-4
Publication status	Published - 2006
Event	International Mechanical Engineering Congress and Exposition, Chicago, Illinois, USA. - s.l. Duration: 5 Nov 2006 → 10 Nov 2006

Publication series

Name
Publisher	s.l.

Conference

Conference	International Mechanical Engineering Congress and Exposition, Chicago, Illinois, USA.
Period	5/11/06 → 10/11/06

Keywords

Elektrotechniek
Techniek
professional journal papers
Conf.proc. > 3 pag

Cite this

@inproceedings{7c633264e67c4622a06b4098c2856fe4,

title = "Experimental verification of Rarefied Gas Squeezed-Film Damping Models used in MEMS (U-SP-2-I-ICT)",

keywords = "Elektrotechniek, Techniek, professional journal papers, Conf.proc. > 3 pag",

author = "L Mol and RF Wolffenbuttel and LA Rocha and E Cretu",

year = "2006",

language = "Undefined/Unknown",

isbn = "0-7918-3790-4",

publisher = "s.l.",

pages = "1--4",

editor = "s.n.",

booktitle = "Proceedings of 2006 International Mechanical Engineering Congress and Exposition",

note = "International Mechanical Engineering Congress and Exposition, Chicago, Illinois, USA. ; Conference date: 05-11-2006 Through 10-11-2006",

}

Experimental verification of Rarefied Gas Squeezed-Film Damping Models used in MEMS (U-SP-2-I-ICT). / Mol, L; Wolffenbuttel, RF; Rocha, LA et al.
Proceedings of 2006 International Mechanical Engineering Congress and Exposition. ed. / s.n. s.l.: s.l., 2006. p. 1-4.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Experimental verification of Rarefied Gas Squeezed-Film Damping Models used in MEMS (U-SP-2-I-ICT)

AU - Mol, L

AU - Wolffenbuttel, RF

AU - Rocha, LA

AU - Cretu, E

PY - 2006

Y1 - 2006

KW - Elektrotechniek

KW - Techniek

KW - professional journal papers

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7918-3790-4

SP - 1

EP - 4

BT - Proceedings of 2006 International Mechanical Engineering Congress and Exposition

A2 - s.n., null

PB - s.l.

CY - s.l.

T2 - International Mechanical Engineering Congress and Exposition, Chicago, Illinois, USA.

Y2 - 5 November 2006 through 10 November 2006

ER -