@inproceedings{b628d350668f4d38b57c395a190cb37d,
title = "Experimental verification of squeezed-film damping models for MEMS",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "LA Rocha and L Mol and E Cretu and RF Wolffenbuttel",
note = "Editor onbekend JH; 16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), G{\"o}teborg, Sweden ; Conference date: 04-09-2005 Through 06-09-2005",
year = "2005",
language = "Undefined/Unknown",
isbn = "91-631-7553-3",
publisher = "s.n.",
pages = "244--247",
editor = "s.n.",
booktitle = "Proceedings of the 16th MME MicroMechanics Europe Workshop",
}