Experimental verification of squeezed-film damping models for MEMS

LA Rocha, L Mol, E Cretu, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of the 16th MME MicroMechanics Europe Workshop
Editors s.n.
Place of Publications.l.
Publishers.n.
Pages244-247
Number of pages4
ISBN (Print)91-631-7553-3
Publication statusPublished - 2005
Event16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), Göteborg, Sweden - s.l.
Duration: 4 Sep 20056 Sep 2005

Publication series

Name
Publishers.n.

Conference

Conference16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), Göteborg, Sweden
Period4/09/056/09/05

Bibliographical note

Editor onbekend JH

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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