Experimentally validated multivariable feedback controller design for a high-precision wafer stage

M van der Wal, G van Baars, F Sperling, OH Bosgra

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 40th IEEE conference on decision and control, December 3-8
Place of Publication	s.l.
Publisher	IEEE Society
Pages	1583-1588
Number of pages	6
ISBN (Print)	0-7803-7061-9
Publication status	Published - 2001
Event	40th IEEE conference on decision and control - s.l. Duration: 3 Dec 2001 → 8 Dec 2001

Name
Publisher	IEEE

Conference	40th IEEE conference on decision and control
Period	3/12/01 → 8/12/01

Keywords

@inproceedings{221a6f7fdb884ddfbeb44e4e681aff0e,

title = "Experimentally validated multivariable feedback controller design for a high-precision wafer stage",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van der Wal}, M and {van Baars}, G and F Sperling and OH Bosgra",

year = "2001",

language = "Undefined/Unknown",

isbn = "0-7803-7061-9",

publisher = "IEEE Society",

pages = "1583--1588",

booktitle = "Proceedings of the 40th IEEE conference on decision and control, December 3-8",

note = "40th IEEE conference on decision and control ; Conference date: 03-12-2001 Through 08-12-2001",

}

Experimentally validated multivariable feedback controller design for a high-precision wafer stage. / van der Wal, M; van Baars, G; Sperling, F et al.
Proceedings of the 40th IEEE conference on decision and control, December 3-8. s.l.: IEEE Society, 2001. p. 1583-1588.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Experimentally validated multivariable feedback controller design for a high-precision wafer stage

AU - van der Wal, M

AU - van Baars, G

AU - Sperling, F

AU - Bosgra, OH

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7803-7061-9

SP - 1583

EP - 1588

BT - Proceedings of the 40th IEEE conference on decision and control, December 3-8

PB - IEEE Society

CY - s.l.

T2 - 40th IEEE conference on decision and control

Y2 - 3 December 2001 through 8 December 2001

ER -