Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

OTA Janssen, S van Haver, AJEM Janssen, JJM Braat, HP Urbach, SF Pereira

Research output: Contribution to journalConference articleScientificpeer-review

11 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1-9
Number of pages9
JournalProceedings of SPIE- International Society for Optical Engineering
Issue number29
Publication statusPublished - 2008

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