Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

OTA Janssen, S van Haver, AJEM Janssen, JJM Braat, HP Urbach, SF Pereira

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1-9
Number of pages	9
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	6924
Issue number	29
Publication status	Published - 2008

DOI:10.1117/12.772497

Keywords

@article{5ac4665a6df64bac880d8cf463fdad35,

title = "Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm",

keywords = "Peer-lijst tijdschrift",

author = "OTA Janssen and {van Haver}, S and AJEM Janssen and JJM Braat and HP Urbach and SF Pereira",

note = "DOI:10.1117/12.772497",

year = "2008",

language = "Undefined/Unknown",

volume = "6924",

pages = "1--9",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

number = "29",

}

Research output: Contribution to journal › Conference article › Scientific › peer-review

TY - JOUR

T1 - Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

AU - Janssen, OTA

AU - van Haver, S

AU - Janssen, AJEM

AU - Braat, JJM

AU - Urbach, HP

AU - Pereira, SF

N1 - DOI:10.1117/12.772497

PY - 2008

Y1 - 2008

KW - Peer-lijst tijdschrift

M3 - Conference article

SN - 0277-786X

VL - 6924

SP - 1

EP - 9

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

IS - 29

ER -