Extraction of optical properties of flat and surface-textured transparent conductive oxide films in a broad wavelength range

JA Sap, O Isabella, K Jaeger, M Zeman

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)

Abstract

An accurate characterization method is developed to determine the refractive index of smooth and surface-textured transparent conductive oxide (TCOs) films. The properties are obtained from simultaneous fitting of simulated specular reflectance/transmittance spectra to spectroscopic measurements for different polarizations and angles of light incidence. The simulations are based on a combination of physical models describing dielectric function of TCO films. Besides the refractive index also other material properties of TCO films are obtained, such as the band gap and free carrier absorption. A light scattering model is implemented into the simulations to take into account the diffused part of the light scattered at randomly-textured surfaces of TCO films.
Original languageEnglish
Pages (from-to)1096-1101
Number of pages6
JournalThin Solid Films
Volume520
Issue number3
DOIs
Publication statusPublished - 2011

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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