Extrapolation of optimal lifted system ILC solution, with application to a waferstage

BG Dijkstra, OH Bosgra

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

49 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publication2002 American control conference
Place of PublicationPiscataway
PublisherIEEE Society
Pages2595-2600
Number of pages6
ISBN (Print)0-7803-7298-0
Publication statusPublished - 2002
EventConference, Anchorage - Piscataway
Duration: 8 May 200210 May 2002

Publication series

Name
PublisherIEEE

Conference

ConferenceConference, Anchorage
Period8/05/0210/05/02

Keywords

  • Conf.proc. > 3 pag

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