Extreme ultraviolet photoelectron spectroscopy on fluorinated monolayers: Towards nanolithography on monolayers

Olivier Lugier, Alessandro Troglia, Najmeh Sadegh, Luc van Kessel, Roland Bliem, Nicola Mahne, Stefano Nannarone, Sonia Castellanos*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

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Engineering

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Chemical Engineering