Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 183-186 |
Number of pages | 4 |
Journal | Microelectronic Engineering |
Volume | 30 |
Publication status | Published - 1996 |
Extreme UV Lithography: Development of a laser plasma source and multilayer reflective optics
F Bijkerk, LA Shmaenol, E Louis, HJ Voorma, NB Koster, FA van Goor, J van Spijker, EWJM van der Drift, J Romijn, BAC Rousseeuw, T Zijlstra
Research output: Contribution to journal › Article › Scientific › peer-review
13
Citations
(Scopus)