Extremely ultra-shallow p+-n boron-deposited silicon diodes applied to DUV photodiodes

F Sarubbi, LK Nanver, TLM Scholtes, S Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

14 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	66th annual device research conference
Editors	J Appenzeller
Place of Publication	s.l.
Publisher	IEEE
Pages	143-144
Number of pages	2
ISBN (Print)	978-1-4244-1942-5
Publication status	Published - 2008
Event	In Digest IEEE 66th annual device research conference, Santa Barbara, California, USA - s.l. Duration: 23 Jun 2008 → 25 Jun 2008

Name
Publisher	IEEE

Conference	In Digest IEEE 66th annual device research conference, Santa Barbara, California, USA
Period	23/06/08 → 25/06/08

Keywords

@inproceedings{7364d5b5ffd0415495ef7dedb34a0489,

title = "Extremely ultra-shallow p+-n boron-deposited silicon diodes applied to DUV photodiodes",

keywords = "conference contrib. refereed, Geen BTA classificatie",

author = "F Sarubbi and LK Nanver and TLM Scholtes and S Nihtianov",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-1-4244-1942-5",

publisher = "IEEE",

pages = "143--144",

editor = "J Appenzeller",

booktitle = "66th annual device research conference",

address = "United States",

note = "In Digest IEEE 66th annual device research conference, Santa Barbara, California, USA ; Conference date: 23-06-2008 Through 25-06-2008",

}

TY - GEN

T1 - Extremely ultra-shallow p+-n boron-deposited silicon diodes applied to DUV photodiodes

AU - Sarubbi, F

AU - Nanver, LK

AU - Scholtes, TLM

AU - Nihtianov, S

PY - 2008

Y1 - 2008

KW - conference contrib. refereed

KW - Geen BTA classificatie

M3 - Conference contribution

SN - 978-1-4244-1942-5

SP - 143

EP - 144

BT - 66th annual device research conference

A2 - Appenzeller, J

PB - IEEE

CY - s.l.

T2 - In Digest IEEE 66th annual device research conference, Santa Barbara, California, USA

Y2 - 23 June 2008 through 25 June 2008

ER -