Extremely ultrashallow junctions for a high-linearity silicon-on-glass RF varactor-diode technology

LK Nanver, F Sarubbi, V Gonda, M Popadic, TLM Scholtes, WB De Boer, K Buisman

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publicationIEEE international workshop on junction technology
EditorsYL Jiang, XP Qu, GP Ru, BZ Li
Place of Publications.l.
PublisherIEEE Society
Pages101-106
Number of pages6
ISBN (Print)978-1-4244-1737-7
Publication statusPublished - 2008
EventIWJT 2008, Shanghai, China - s.l.
Duration: 15 May 200816 May 2008

Publication series

Name
PublisherIEEE

Conference

ConferenceIWJT 2008, Shanghai, China
Period15/05/0816/05/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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