Fabrication and characterization of a PECVD SiC evanescent wave optical sensor

G Pandraud, PJ French, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

27 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)61-66
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume142
Publication statusPublished - 2008

Keywords

  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

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