Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

A Emadi; HW Wu; S Grabarnik; G de Graaf; K Hedsten; P Enoksson; JHG Correia; RF Wolffenbuttel

doi:10.1016/j.sna.2010.04.029

Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

A Emadi, HW Wu, S Grabarnik, G de Graaf, K Hedsten, P Enoksson, JHG Correia, RF Wolffenbuttel

Electronic Instrumentation

Research output: Contribution to journal › Article › Scientific › peer-review

37 Citations (Scopus)

Original language	English
Pages (from-to)	400-405
Number of pages	6
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	162
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2010.04.029
Publication status	Published - 2010

Keywords

CWTS 0.75 <= JFIS < 2.00

Access to Document

10.1016/j.sna.2010.04.029

Cite this

Emadi, A., Wu, HW., Grabarnik, S., de Graaf, G., Hedsten, K., Enoksson, P., Correia, JHG., & Wolffenbuttel, RF. (2010). Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer. Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, 162(2), 400-405. https://doi.org/10.1016/j.sna.2010.04.029

@article{055e32ac9dd44b4a9219208a9490e4ce,

title = "Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "A Emadi and HW Wu and S Grabarnik and {de Graaf}, G and K Hedsten and P Enoksson and JHG Correia and RF Wolffenbuttel",

year = "2010",

doi = "10.1016/j.sna.2010.04.029",

language = "English",

volume = "162",

pages = "400--405",

journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",

issn = "0924-4247",

publisher = "Elsevier",

number = "2",

}

Emadi, A, Wu, HW, Grabarnik, S, de Graaf, G, Hedsten, K, Enoksson, P, Correia, JHG & Wolffenbuttel, RF 2010, 'Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer', Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, vol. 162, no. 2, pp. 400-405. https://doi.org/10.1016/j.sna.2010.04.029

Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer. / Emadi, A; Wu, HW; Grabarnik, S et al.
In: Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, Vol. 162, No. 2, 2010, p. 400-405.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

AU - Emadi, A

AU - Wu, HW

AU - Grabarnik, S

AU - de Graaf, G

AU - Hedsten, K

AU - Enoksson, P

AU - Correia, JHG

AU - Wolffenbuttel, RF

PY - 2010

Y1 - 2010

KW - CWTS 0.75 <= JFIS < 2.00

U2 - 10.1016/j.sna.2010.04.029

DO - 10.1016/j.sna.2010.04.029

M3 - Article

SN - 0924-4247

VL - 162

SP - 400

EP - 405

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

IS - 2

ER -

Emadi A, Wu HW, Grabarnik S, de Graaf G, Hedsten K, Enoksson P et al. Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer. Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers. 2010;162(2):400-405. doi: 10.1016/j.sna.2010.04.029