Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

A Emadi, HW Wu, S Grabarnik, G de Graaf, K Hedsten, P Enoksson, JHG Correia, RF Wolffenbuttel

Research output: Contribution to journalArticleScientificpeer-review

29 Citations (Scopus)
Original languageEnglish
Pages (from-to)400-405
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Issue number2
Publication statusPublished - 2010


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