Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics

E Serre, M Bonaldi, A Borrielli, F Marin, L Marconi, F Marino, G Pandraud, A Pontin, GA Prodi, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)138-142
Number of pages5
JournalMicroelectronic Engineering
Issue numberSeptember
Publication statusPublished - 2015

Bibliographical note

Special issue: Micro/Nano Devices and Systems 2014
Available online 6-4-2015

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