Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range

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1 Citation (Scopus)


This paper presents the design, fabrication, and characterization of MEMS airgap-based optical filters designed for the ultraviolet (UV) spectral range. Optical design, process conditions, and material choice have been optimized for obtaining large-area and optically flat membranes. Several distributed Bragg reflectors centered at λ=400 nm were designed using silicon oxide and nitride layers as the membrane materials. Airgap Bragg reflectors with up to 80% fill-factor were fabricated in standard Si technology and the spectral reflectance of the reflectors were compared. The optical characterization demonstrated a high reflectance (up to 80%) with only a few number of layers over a bandwidth of up to 175 nm in the UV spectral range.
Original languageEnglish
Title of host publicationTransducers 2017
Subtitle of host publication19th International Conference on Solid-State Sensors, Actuators, and Microsystems
EditorsW. Fang, C.P. Hung, S. Shoji
Place of PublicationPiscataway, NJ
Number of pages4
ISBN (Electronic)978-1-5386-2731-0
ISBN (Print)978-1-5386-2732-7
Publication statusPublished - 2017
EventTransducers 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems - Kaohsiung, Taiwan
Duration: 18 Jun 201722 Jun 2017


ConferenceTransducers 2017
Abbreviated titleTransducers'17


  • micromechanical devices
  • optical filters
  • reflectivity
  • silicon compounds
  • MEMS airgap-based optical filters
  • airgap Bragg reflectors
  • fill-factor
  • membrane materials
  • nitride layers
  • optical characterization
  • reflectance
  • silicon oxide layers
  • silicon technology
  • spectral reflectance
  • ultraviolet spectral range
  • Optical device fabrication
  • Optical filters
  • Optical reflection
  • Optical refraction
  • Optical variables control
  • Reflectivity
  • Airgap optical filters
  • Distributed Bragg reflector
  • Optical MEMS
  • Optical bandwidth
  • UV filters
  • UV spectral range


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