Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range

M. Ghaderi; R. F. Wolffenbuttel

doi:10.1109/TRANSDUCERS.2017.7994453

Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range

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Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

This paper presents the design, fabrication, and characterization of MEMS airgap-based optical filters designed for the ultraviolet (UV) spectral range. Optical design, process conditions, and material choice have been optimized for obtaining large-area and optically flat membranes. Several distributed Bragg reflectors centered at λ=400 nm were designed using silicon oxide and nitride layers as the membrane materials. Airgap Bragg reflectors with up to 80% fill-factor were fabricated in standard Si technology and the spectral reflectance of the reflectors were compared. The optical characterization demonstrated a high reflectance (up to 80%) with only a few number of layers over a bandwidth of up to 175 nm in the UV spectral range.

Original language	English
Title of host publication	Transducers 2017
Subtitle of host publication	19th International Conference on Solid-State Sensors, Actuators, and Microsystems
Editors	W. Fang, C.P. Hung, S. Shoji
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	1959-1962
Number of pages	4
ISBN (Electronic)	978-1-5386-2731-0
ISBN (Print)	978-1-5386-2732-7
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994453
Publication status	Published - 2017
Event	Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems - Kaohsiung, Taiwan Duration: 18 Jun 2017 → 22 Jun 2017

Conference

Conference	Transducers 2017
Abbreviated title	Transducers'17
Country/Territory	Taiwan
City	Kaohsiung
Period	18/06/17 → 22/06/17

Keywords

micromechanical devices
optical filters
reflectivity
silicon compounds
MEMS airgap-based optical filters
airgap Bragg reflectors
fill-factor
membrane materials
nitride layers
optical characterization
reflectance
silicon oxide layers
silicon technology
spectral reflectance
ultraviolet spectral range
Optical device fabrication
Optical filters
Optical reflection
Optical refraction
Optical variables control
Reflectivity
Airgap optical filters
Distributed Bragg reflector
Optical MEMS
Optical bandwidth
UV filters
UV spectral range

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10.1109/TRANSDUCERS.2017.7994453

Cite this

@inproceedings{e2f6924270e044feb45c1697fa5008e3,

title = "Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range",

abstract = "This paper presents the design, fabrication, and characterization of MEMS airgap-based optical filters designed for the ultraviolet (UV) spectral range. Optical design, process conditions, and material choice have been optimized for obtaining large-area and optically flat membranes. Several distributed Bragg reflectors centered at λ=400 nm were designed using silicon oxide and nitride layers as the membrane materials. Airgap Bragg reflectors with up to 80% fill-factor were fabricated in standard Si technology and the spectral reflectance of the reflectors were compared. The optical characterization demonstrated a high reflectance (up to 80%) with only a few number of layers over a bandwidth of up to 175 nm in the UV spectral range.",

keywords = "micromechanical devices, optical filters, reflectivity, silicon compounds, MEMS airgap-based optical filters, airgap Bragg reflectors, fill-factor, membrane materials, nitride layers, optical characterization, reflectance, silicon oxide layers, silicon technology, spectral reflectance, ultraviolet spectral range, Optical device fabrication, Optical filters, Optical reflection, Optical refraction, Optical variables control, Reflectivity, Airgap optical filters, Distributed Bragg reflector, Optical MEMS, Optical bandwidth, UV filters, UV spectral range",

author = "M. Ghaderi and Wolffenbuttel, {R. F.}",

year = "2017",

doi = "10.1109/TRANSDUCERS.2017.7994453",

language = "English",

isbn = "978-1-5386-2732-7",

pages = "1959--1962",

editor = "W. Fang and C.P. Hung and S. Shoji",

booktitle = "Transducers 2017",

publisher = "IEEE",

address = "United States",

note = "Transducers 2017 : 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'17 ; Conference date: 18-06-2017 Through 22-06-2017",

}

Ghaderi, M & Wolffenbuttel, RF 2017, Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range. in W Fang, CP Hung & S Shoji (eds), Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators, and Microsystems. IEEE, Piscataway, NJ, pp. 1959-1962, Transducers 2017, Kaohsiung, Taiwan, 18/06/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994453

Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range. / Ghaderi, M.; Wolffenbuttel, R. F.
Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators, and Microsystems. ed. / W. Fang; C.P. Hung; S. Shoji. Piscataway, NJ: IEEE, 2017. p. 1959-1962.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range

AU - Ghaderi, M.

AU - Wolffenbuttel, R. F.

PY - 2017

Y1 - 2017

N2 - This paper presents the design, fabrication, and characterization of MEMS airgap-based optical filters designed for the ultraviolet (UV) spectral range. Optical design, process conditions, and material choice have been optimized for obtaining large-area and optically flat membranes. Several distributed Bragg reflectors centered at λ=400 nm were designed using silicon oxide and nitride layers as the membrane materials. Airgap Bragg reflectors with up to 80% fill-factor were fabricated in standard Si technology and the spectral reflectance of the reflectors were compared. The optical characterization demonstrated a high reflectance (up to 80%) with only a few number of layers over a bandwidth of up to 175 nm in the UV spectral range.

AB - This paper presents the design, fabrication, and characterization of MEMS airgap-based optical filters designed for the ultraviolet (UV) spectral range. Optical design, process conditions, and material choice have been optimized for obtaining large-area and optically flat membranes. Several distributed Bragg reflectors centered at λ=400 nm were designed using silicon oxide and nitride layers as the membrane materials. Airgap Bragg reflectors with up to 80% fill-factor were fabricated in standard Si technology and the spectral reflectance of the reflectors were compared. The optical characterization demonstrated a high reflectance (up to 80%) with only a few number of layers over a bandwidth of up to 175 nm in the UV spectral range.

KW - micromechanical devices

KW - optical filters

KW - reflectivity

KW - silicon compounds

KW - MEMS airgap-based optical filters

KW - airgap Bragg reflectors

KW - fill-factor

KW - membrane materials

KW - nitride layers

KW - optical characterization

KW - reflectance

KW - silicon oxide layers

KW - silicon technology

KW - spectral reflectance

KW - ultraviolet spectral range

KW - Optical device fabrication

KW - Optical filters

KW - Optical reflection

KW - Optical refraction

KW - Optical variables control

KW - Reflectivity

KW - Airgap optical filters

KW - Distributed Bragg reflector

KW - Optical MEMS

KW - Optical bandwidth

KW - UV filters

KW - UV spectral range

U2 - 10.1109/TRANSDUCERS.2017.7994453

DO - 10.1109/TRANSDUCERS.2017.7994453

M3 - Conference contribution

SN - 978-1-5386-2732-7

SP - 1959

EP - 1962

BT - Transducers 2017

A2 - Fang, W.

A2 - Hung, C.P.

A2 - Shoji, S.

PB - IEEE

CY - Piscataway, NJ

T2 - Transducers 2017

Y2 - 18 June 2017 through 22 June 2017

ER -

Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range

Abstract

Conference

Keywords

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