Fabrication and characterization of suspended beam structures for SiO2 photonic MEMS

Fabrication and characterization of suspended beam structures for SiO₂ photonic MEMS

TJ Peters, M Tichem

Research output: Contribution to journal › Article › Scientific › peer-review

12 Citations (Scopus)

Original language	English
Article number	105003
Number of pages	8
Journal	Journal of Micromechanics and Microengineering
Volume	25
Issue number	10
DOIs	https://doi.org/10.1088/0960-1317/25/10/105003
Publication status	Published - 2015

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AU - Tichem, M

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