Fabrication and numerical analysis of nanoscale silicon pillars for IC applications

Y Civale; P Hadley; LK Nanver; EJG Goudena; JHCM Slabbekoorn

Fabrication and numerical analysis of nanoscale silicon pillars for IC applications

Y Civale, P Hadley, LK Nanver, EJG Goudena, JHCM Slabbekoorn

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)
Editors	s.n.
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	79-82
Number of pages	4
ISBN (Print)	90-73461-50-2
Publication status	Published - 2005
Event	STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands - Utrecht Duration: 17 Nov 2005 → 18 Nov 2005

Publication series

Name
Publisher	STW

Conference

Conference	STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands
Period	17/11/05 → 18/11/05

Bibliographical note

Editors onbekend, WPM/STW

Keywords

conference contrib. refereed
Vakpubl., Overig wet. > 3 pag

Cite this

@inproceedings{7142e472437e42e7ab44f0a6dffa284f,

title = "Fabrication and numerical analysis of nanoscale silicon pillars for IC applications",

keywords = "conference contrib. refereed, Vakpubl., Overig wet. > 3 pag",

author = "Y Civale and P Hadley and LK Nanver and EJG Goudena and JHCM Slabbekoorn",

note = "Editors onbekend, WPM/STW; STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands ; Conference date: 17-11-2005 Through 18-11-2005",

year = "2005",

language = "Undefined/Unknown",

isbn = "90-73461-50-2",

publisher = "STW",

pages = "79--82",

editor = "s.n.",

booktitle = "Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)",

}

Civale, Y, Hadley, P, Nanver, LK, Goudena, EJG & Slabbekoorn, JHCM 2005, Fabrication and numerical analysis of nanoscale silicon pillars for IC applications. in s.n. (ed.), Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). STW, Utrecht, The Netherlands, pp. 79-82, STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands, 17/11/05.

Fabrication and numerical analysis of nanoscale silicon pillars for IC applications. / Civale, Y; Hadley, P; Nanver, LK et al.
Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). ed. / s.n. Utrecht, The Netherlands: STW, 2005. p. 79-82.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Fabrication and numerical analysis of nanoscale silicon pillars for IC applications

AU - Civale, Y

AU - Hadley, P

AU - Nanver, LK

AU - Goudena, EJG

AU - Slabbekoorn, JHCM

N1 - Editors onbekend, WPM/STW

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-50-2

SP - 79

EP - 82

BT - Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)

A2 - s.n., null

PB - STW

CY - Utrecht, The Netherlands

T2 - STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands

Y2 - 17 November 2005 through 18 November 2005

ER -