Fabrication and optical measurements of a TiO2 ALD evanescent waveguide sensor

A Purniawan, G Pandraud, TSY Moh, A Marthen, KA Vakalopoulos, PJ French, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)
Original languageEnglish
Pages (from-to)127-132
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume188
DOIs
Publication statusPublished - 2012

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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