@inproceedings{e3c33b78fe5a475f8467881e1cf6d2b4,
title = "Fabrication and optical measurements of multi-slit grating based infrared micro-spectrometer",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "SH Kong and DDL Wijngaards and {de Graaf}, G and RF Wolffenbuttel",
year = "2001",
language = "Undefined/Unknown",
isbn = "3-540-42150-5",
publisher = "Springer",
pages = "548--551",
editor = "{E Obermeier}",
booktitle = "Transducers'01: technical papers. Vol. 1",
note = "11th International Conference on Solid-State Sensors and Actuators, Munich ; Conference date: 10-06-2001 Through 14-06-2001",
}