Research output per year
Research output per year
| Original language | English |
|---|---|
| IPC | H01L, C23C |
| Publication status | Published - 2020 |
Research output
- 1 Patent
-
Fabrication methods
Kouwenhoven, L. P. & Singh, A., 2021, IPC No. H01L, C23C, Patent No. US 11024792 B2Research output: Patent