Research output per year
Research output per year
| Original language | English |
|---|---|
| Patent number | US 11024792 B2 |
| IPC | H01L, C23C |
| Publication status | Published - 2021 |
Research output
- 1 Patent
-
Fabrication methods
Kouwenhoven, L. P. & Singh, A., 2020, IPC No. H01L, C23C, Priority No. US 2020243742 A1Research output: Patent