Fabrication of 2-D photonic crystal waveguides for 1.5 micrometer in silicon by deep anisotropic dry etching.

T Zijlstra, EWJM van der Drift, MJA de Dood, E Snoeks, A Polman

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2734-2739
Number of pages	6
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	17
Issue number	6
Publication status	Published - 1999

Cite this

@article{18f76a2c97b5412ca1507e9c4da42d08,

title = "Fabrication of 2-D photonic crystal waveguides for 1.5 micrometer in silicon by deep anisotropic dry etching.",

author = "T Zijlstra and {van der Drift}, EWJM and {de Dood}, MJA and E Snoeks and A Polman",

year = "1999",

language = "Undefined/Unknown",

volume = "17",

pages = "2734--2739",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Fabrication of 2-D photonic crystal waveguides for 1.5 micrometer in silicon by deep anisotropic dry etching.

AU - Zijlstra, T

AU - van der Drift, EWJM

AU - de Dood, MJA

AU - Snoeks, E

AU - Polman, A

PY - 1999

Y1 - 1999

M3 - Article

SN - 1071-1023

VL - 17

SP - 2734

EP - 2739

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -