Fabrication of 2-D photonic crystal waveguides for 1.5 micrometer in silicon by deep anisotropic dry etching.

T Zijlstra, EWJM van der Drift, MJA de Dood, E Snoeks, A Polman

Research output: Contribution to journalArticleScientificpeer-review

96 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2734-2739
Number of pages6
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume17
Issue number6
Publication statusPublished - 1999

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