Fabrication of 2D photonic crystal waveguides for 1.5 µm in silicon by deep anisotropic dry etching.

T Zijlstra, EWJM van der Drift, MJA de Dood, E Snoeks, A Polman

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings 43rd Int. Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
Editors	J Wolfe
Pages	2734-2739
Number of pages	6
Publication status	Published - 1999

Keywords

@inproceedings{2ba9ee6d8196496f84427042999cc4ae,

title = "Fabrication of 2D photonic crystal waveguides for 1.5 µm in silicon by deep anisotropic dry etching.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "T Zijlstra and {van der Drift}, EWJM and {de Dood}, MJA and E Snoeks and A Polman",

year = "1999",

language = "Undefined/Unknown",

isbn = "1-56396-909-2",

pages = "2734--2739",

editor = "J Wolfe",

booktitle = "Proceedings 43rd Int. Conference on Electron, Ion and Photon Beam Technology and Nanofabrication",

}

Fabrication of 2D photonic crystal waveguides for 1.5 µm in silicon by deep anisotropic dry etching. / Zijlstra, T; van der Drift, EWJM; de Dood, MJA et al.
Proceedings 43rd Int. Conference on Electron, Ion and Photon Beam Technology and Nanofabrication. ed. / J Wolfe. 1999. p. 2734-2739.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Fabrication of 2D photonic crystal waveguides for 1.5 µm in silicon by deep anisotropic dry etching.

AU - Zijlstra, T

AU - van der Drift, EWJM

AU - de Dood, MJA

AU - Snoeks, E

AU - Polman, A

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 1-56396-909-2

SP - 2734

EP - 2739

BT - Proceedings 43rd Int. Conference on Electron, Ion and Photon Beam Technology and Nanofabrication

A2 - Wolfe, J

ER -