@inproceedings{2ba9ee6d8196496f84427042999cc4ae,
title = "Fabrication of 2D photonic crystal waveguides for 1.5 µm in silicon by deep anisotropic dry etching.",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "T Zijlstra and {van der Drift}, EWJM and {de Dood}, MJA and E Snoeks and A Polman",
year = "1999",
language = "Undefined/Unknown",
isbn = "1-56396-909-2",
pages = "2734--2739",
editor = "J Wolfe",
booktitle = "Proceedings 43rd Int. Conference on Electron, Ion and Photon Beam Technology and Nanofabrication",
}