Fabrication of 2D photonic crystal waveguides for 1.5 µm in silicon by deep anisotropic dry etching.

T Zijlstra, EWJM van der Drift, MJA de Dood, E Snoeks, A Polman

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

96 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings 43rd Int. Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
EditorsJ Wolfe
Pages2734-2739
Number of pages6
Publication statusPublished - 1999

Keywords

  • ZX Int.klas.verslagjaar < 2002

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