Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

H Ohji, PTJ Gennissen, PJ French, K Tsutsumi

Research output: Contribution to journalArticleScientificpeer-review

27 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)440-444
Number of pages5
JournalJournal of Micromechanics and Microengineering
Issue number3
Publication statusPublished - 2000


  • ZX Int.klas.verslagjaar < 2002

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