Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 440-444 |
Number of pages | 5 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 10 |
Issue number | 3 |
Publication status | Published - 2000 |
Keywords
- ZX Int.klas.verslagjaar < 2002
Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 440-444 |
Number of pages | 5 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 10 |
Issue number | 3 |
Publication status | Published - 2000 |