Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

H Ohji, PTJ Gennissen, PJ French, K Tsutsumi

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	440-444
Number of pages	5
Journal	Journal of Micromechanics and Microengineering
Volume	10
Issue number	3
Publication status	Published - 2000

Keywords

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title = "Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "H Ohji and PTJ Gennissen and PJ French and K Tsutsumi",

year = "2000",

language = "Undefined/Unknown",

volume = "10",

pages = "440--444",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "3",

}

TY - JOUR

T1 - Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

AU - Ohji, H

AU - Gennissen, PTJ

AU - French, PJ

AU - Tsutsumi, K

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0960-1317

VL - 10

SP - 440

EP - 444

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 3

ER -