@inproceedings{1c4d20ecf7c844d7b2a63f37afd9106d,
title = "Fabrication of a CMOS compatibile pressure sensor for harsh environments",
keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",
author = "L Pakula and H Yang and TMH Pham and PJ French and PM Sarro",
year = "2003",
language = "Undefined/Unknown",
isbn = "0-7803-7744-3",
publisher = "IEEE Society",
pages = "502--505",
editor = "s.n.",
booktitle = "MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems",
note = "IEEE 16th annual international conference on micro electro mechanical systems, Kyoto, Japan ; Conference date: 19-01-2003 Through 23-01-2003",
}