Fabrication of a CMOS compatible pressure sensor for harsh environments

L Pakula, H Yang, TMH Pham, PJ French, PM Sarro

Research output: Contribution to journalArticlepeer-review

66 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1478-1483
Number of pages6
JournalJournal of Micromechanics and Microengineering
Publication statusPublished - 2004

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