Fabrication of a CMOS compatible pressure sensor for harsh environments

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1478-1483
Number of pages	6
Journal	Journal of Micromechanics and Microengineering
Volume	14
Publication status	Published - 2004

ed.is niet bekend

Keywords

@article{0ad432f12a32412fb10e4131b8c89eea,

title = "Fabrication of a CMOS compatible pressure sensor for harsh environments",

keywords = "ZX CWTS 1.00 <= JFIS < 3.00",

author = "L Pakula and H Yang and TMH Pham and PJ French and PM Sarro",

note = "ed.is niet bekend",

year = "2004",

language = "Undefined/Unknown",

volume = "14",

pages = "1478--1483",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

}

TY - JOUR

T1 - Fabrication of a CMOS compatible pressure sensor for harsh environments

AU - Pakula, L

AU - Yang, H

AU - Pham, TMH

AU - French, PJ

AU - Sarro, PM

N1 - ed.is niet bekend

PY - 2004

Y1 - 2004

KW - ZX CWTS 1.00 <= JFIS < 3.00

M3 - Article

SN - 0960-1317

VL - 14

SP - 1478

EP - 1483

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -