Fabrication of a CMOS compatible vertical accelerometer

L Pakula, H Yang, TMH Pham, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationEUROSENSORS 17th European conference on solid-state transducers
Editors s.n.
Place of PublicationGuimarães
PublisherUniversity of Minho
Pages635-638
Number of pages4
ISBN (Print)972-98603-1-9
Publication statusPublished - 2003
Event17th European conference on solid-state transducers, Guimarães, Portugal - Guimarães
Duration: 21 Sep 200324 Sep 2003

Publication series

Name
PublisherUniversity of Minho

Conference

Conference17th European conference on solid-state transducers, Guimarães, Portugal
Period21/09/0324/09/03

Keywords

  • Conf.proc. > 3 pag

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