@inproceedings{cd177f71668940458b4b49c5bfd2a203,
title = "Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "H Ohji and PTJ Gennissen and PJ French and K Tsutsumi",
year = "1999",
language = "Undefined/Unknown",
isbn = "0-7803-5197-5",
publisher = "IEEE",
pages = "1--5",
booktitle = "MEMS '99 [CD-ROM]",
address = "United States",
note = "12th IEEE International Micro Electro Mechanical Systems Conference, Orlando ; Conference date: 17-01-1999 Through 21-01-1999",
}