Fabrication of accelerometers by thin-SOI micromachining

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of sense of contact X
Editors s.n.
Place of Publicationzeist,the netherlands
PublisherSense of contact X
Pages1-4
Number of pages4
ISBN (Print)978-90-74702-54-6
Publication statusPublished - 2008
EventSense of contact 10, Zeist, The Netherlands - zeist,the netherlands
Duration: 9 Apr 20089 Apr 2008

Publication series

Name
PublisherSense of contact X

Conference

ConferenceSense of contact 10, Zeist, The Netherlands
Period9/04/089/04/08

Keywords

  • conference contrib. non-refer.
  • Conf.proc. > 3 pag

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