@inproceedings{68593f160fdc4df58c4e4ed8388674d4,
title = "Fabrication of accelerometers by thin-SOI micromachining",
keywords = "conference contrib. non-refer., Conf.proc. > 3 pag",
author = "V Rajaraman and L Pakula and KAA Makinwa and PJ French",
note = "NEO; Sense of contact 10, Zeist, The Netherlands ; Conference date: 09-04-2008 Through 09-04-2008",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-90-74702-54-6",
publisher = "Sense of contact X",
pages = "1--4",
editor = "s.n.",
booktitle = "Proceedings of sense of contact X",
}