Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph

S Grabarnik, A Emadi, HW Wu, G de Graaf, GV Vdovin, RF Wolffenbuttel

Research output: Contribution to journalArticleScientific

3 Citations (Scopus)
Original languageUndefined/Unknown
JournalJournal of Micromechanics and Microengineering
Issue number6
Publication statusPublished - 2008


  • Elektrotechniek
  • Techniek
  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

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