@article{5287c5a5e92e4066a51bdde6cc37b7c7,
title = "Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph",
keywords = "Elektrotechniek, Techniek, professional journal papers, CWTS 0.75 <= JFIS < 2.00",
author = "S Grabarnik and A Emadi and HW Wu and \{de Graaf\}, G and GV Vdovin and RF Wolffenbuttel",
year = "2008",
language = "Undefined/Unknown",
volume = "18",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "6",
}