Fabrication of an integrated silicon infrared micro-spectrometer

SH Kong, DDL Wijngaards, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	MME '00
Editors	Y Bäcklund, C Hedlund
Place of Publication	S.l.
Publisher	s.n.
Pages	1-4
Number of pages	4
Publication status	Published - 2000
Event	Micromechanics Europe, Uppsala - S.l. Duration: 1 Oct 2000 → 3 Oct 2000

Name
Publisher	S.n.

Conference	Micromechanics Europe, Uppsala
Period	1/10/00 → 3/10/00

Keywords

@inproceedings{3325c4f0921e4b6b99cf0e0b61182ba0,

title = "Fabrication of an integrated silicon infrared micro-spectrometer",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "SH Kong and DDL Wijngaards and RF Wolffenbuttel",

year = "2000",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "1--4",

editor = "{Y B{\"a}cklund} and {C Hedlund}",

booktitle = "MME '00",

note = "Micromechanics Europe, Uppsala ; Conference date: 01-10-2000 Through 03-10-2000",

}

TY - GEN

T1 - Fabrication of an integrated silicon infrared micro-spectrometer

AU - Kong, SH

AU - Wijngaards, DDL

AU - Wolffenbuttel, RF

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 1

EP - 4

BT - MME '00

A2 - Y Bäcklund, null

A2 - C Hedlund, null

PB - s.n.

CY - S.l.

T2 - Micromechanics Europe, Uppsala

Y2 - 1 October 2000 through 3 October 2000

ER -