Fabrication of crystalline membranes oriented in the (111) plane in a (100) silicon wafer

WJ Venstra, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)502-507
Number of pages6
JournalMicroelectronic Engineering
Volume67/68
Publication statusPublished - 2003

Keywords

  • Elektrotechniek
  • Techniek
  • ZX CWTS JFIS < 1.00

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