Fabrication of crystalline membranes oriented in the (111) plane in a (100) silicon wafer

WJ Venstra, PM Sarro

Research output: Contribution to journal › Article › Scientific › peer-review

16 Citations (SciVal)

Original language	Undefined/Unknown
Pages (from-to)	502-507
Number of pages	6
Journal	Microelectronic Engineering
Volume	67/68
Publication status	Published - 2003

Keywords

@article{e788196beebf41b3b9012d97ca8e34e6,

title = "Fabrication of crystalline membranes oriented in the (111) plane in a (100) silicon wafer",

keywords = "Elektrotechniek, Techniek, ZX CWTS JFIS < 1.00",

author = "WJ Venstra and PM Sarro",

year = "2003",

language = "Undefined/Unknown",

volume = "67/68",

pages = "502--507",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}