Fabrication of Devices and Antennas for Millimeter-Wave and Terahertz Systems

Choonsup Lee, D. Gonzalez-Ovejero, M. Alonso-Delpino, T. Reck, A. Peralta, I. Mehdi, Goutam Chattopadhyay

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

We have demonstrated corrugated horn antennas at 340 GHz and 560 GHz fabricated with deep reactive ion etching (DRIE) process on silicon. The measurement of a single 340 GHz antenna showed that the return loss and gain are approximately 25 dB and 21 dBi, respectively. The measurement of two of the 2x2 560 GHz array antenna showed that the return loss and directivity are 13 dB and 22 dB, respectively. All of the measured antennas had below -25 dB of the cross-polarization and symmetrical beam patterns. The silicon microfabrication technique allows fabrication of hundreds of horn antennas at once, allowing construction of multi-pixel heterodyne imagers and spectrometers at submillimeter wavelengths.

Original languageEnglish
Title of host publicationISAP 2018 - 2018 International Symposium on Antennas and Propagation
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
ISBN (Electronic)9788957083048
Publication statusPublished - 25 Jan 2019
Externally publishedYes
Event2018 International Symposium on Antennas and Propagation, ISAP 2018 - Busan, Korea, Republic of
Duration: 23 Oct 201826 Oct 2018

Publication series

NameISAP 2018 - 2018 International Symposium on Antennas and Propagation

Conference

Conference2018 International Symposium on Antennas and Propagation, ISAP 2018
CountryKorea, Republic of
CityBusan
Period23/10/1826/10/18

Keywords

  • Corrugated Antenna
  • Deep silicon etching
  • Heterodyne
  • Silicon Platelets
  • Submillimeter wave

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