TY - GEN
T1 - Fabrication of Devices and Antennas for Millimeter-Wave and Terahertz Systems
AU - Lee, Choonsup
AU - Gonzalez-Ovejero, D.
AU - Alonso-Delpino, M.
AU - Jung, C.
AU - Mehdi, I.
AU - Chattopadhyay, Goutam
PY - 2019/9
Y1 - 2019/9
N2 - We have demonstrated corrugated horn antennas at 560 GHz fabricated with a deep reactive ion etching (DRIE) process on silicon. The measurement of two of the ( 2 times 2)560 GHz array antenna has shown that the return loss and directivity are 13 dB and 22 dB, respectively. All of the measured antennas had below-25 dB of the cross-polarization and symmetrical beam patterns. The silicon microfabrication technique enables us to build hundreds of horn antennas at once, allowing construction of multi-pixel heterodyne imagers and spectrometers at submillimeter wavelengths.
AB - We have demonstrated corrugated horn antennas at 560 GHz fabricated with a deep reactive ion etching (DRIE) process on silicon. The measurement of two of the ( 2 times 2)560 GHz array antenna has shown that the return loss and directivity are 13 dB and 22 dB, respectively. All of the measured antennas had below-25 dB of the cross-polarization and symmetrical beam patterns. The silicon microfabrication technique enables us to build hundreds of horn antennas at once, allowing construction of multi-pixel heterodyne imagers and spectrometers at submillimeter wavelengths.
UR - https://www.scopus.com/pages/publications/85074693856
U2 - 10.1109/IRMMW-THz.2019.8873985
DO - 10.1109/IRMMW-THz.2019.8873985
M3 - Conference contribution
AN - SCOPUS:85074693856
T3 - International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
BT - IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves
PB - IEEE
T2 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019
Y2 - 1 September 2019 through 6 September 2019
ER -