Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate

B Yan, HTM Pham, Y Ma, Y Zhuang, PM Sarro

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{ede71a4b4dd74ad19491fc84e145ad92,

title = "Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate",

keywords = "academic journal papers, CWTS JFIS >= 2.00",

author = "B Yan and HTM Pham and Y Ma and Y Zhuang and PM Sarro",

year = "2007",

language = "Undefined/Unknown",

volume = "91",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

}