Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA

M. L. Ridder; P. Khosropanah; R. A. Hijmering; T. Suzuki; M. P. Bruijn; H. F C Hoevers; J. R. Gao; M. R. Zuiddam

doi:10.1007/s10909-015-1381-z

Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA

M. L. Ridder^*, P. Khosropanah, R. A. Hijmering, T. Suzuki, M. P. Bruijn, H. F C Hoevers, J. R. Gao, M. R. Zuiddam

^*Corresponding author for this work

QN/Kavli Nanolab Delft

Research output: Contribution to journal › Article › Scientific › peer-review

21 Citations (Scopus)

Abstract

Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 × 10^{- 19} W/Hz^{1 / 2} have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 μ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.

Original language	English
Pages (from-to)	60-65
Number of pages	6
Journal	Journal of Low Temperature Physics
Volume	184
Issue number	1-2
DOIs	https://doi.org/10.1007/s10909-015-1381-z
Publication status	Published - 1 Jul 2016

Keywords

Bolometer
SiN membrane
Transition edge sensors

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10.1007/s10909-015-1381-z

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@article{25ec36d1522d492ba691c89307825836,

title = "Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA",

abstract = "Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 × 10- 19 W/Hz1 / 2 have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 μ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.",

keywords = "Bolometer, SiN membrane, Transition edge sensors",

author = "Ridder, {M. L.} and P. Khosropanah and Hijmering, {R. A.} and T. Suzuki and Bruijn, {M. P.} and Hoevers, {H. F C} and Gao, {J. R.} and Zuiddam, {M. R.}",

year = "2016",

month = jul,

day = "1",

doi = "10.1007/s10909-015-1381-z",

language = "English",

volume = "184",

pages = "60--65",

journal = "Journal of Low Temperature Physics",

issn = "0022-2291",

publisher = "Springer",

number = "1-2",

}

TY - JOUR

T1 - Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA

AU - Ridder, M. L.

AU - Khosropanah, P.

AU - Hijmering, R. A.

AU - Suzuki, T.

AU - Bruijn, M. P.

AU - Hoevers, H. F C

AU - Gao, J. R.

AU - Zuiddam, M. R.

PY - 2016/7/1

Y1 - 2016/7/1

N2 - Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 × 10- 19 W/Hz1 / 2 have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 μ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.

AB - Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 × 10- 19 W/Hz1 / 2 have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 μ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.

KW - Bolometer

KW - SiN membrane

KW - Transition edge sensors

UR - http://www.scopus.com/inward/record.url?scp=84949517256&partnerID=8YFLogxK

U2 - 10.1007/s10909-015-1381-z

DO - 10.1007/s10909-015-1381-z

M3 - Article

AN - SCOPUS:84949517256

SN - 0022-2291

VL - 184

SP - 60

EP - 65

JO - Journal of Low Temperature Physics

JF - Journal of Low Temperature Physics

IS - 1-2

ER -

Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA

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Keywords

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