Fabrication of low temperature carbon nanotube vertical interconnects compatible with semiconductor technology

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Original language	English
Pages (from-to)	e53260-e53260
Journal	Journal of Visualized Experiments
Volume	106
DOIs	https://doi.org/10.3791/53260
Publication status	Published - 2015

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title = "Fabrication of low temperature carbon nanotube vertical interconnects compatible with semiconductor technology",

author = "S Vollebregt and R Ishihara",

note = "harvest",

year = "2015",

doi = "10.3791/53260",

language = "English",

volume = "106",

pages = "e53260--e53260",

journal = "Journal of Visualized Experiments",

issn = "1940-087X",

publisher = "MYJoVE Corporation",

}

TY - JOUR

T1 - Fabrication of low temperature carbon nanotube vertical interconnects compatible with semiconductor technology

AU - Vollebregt, S

AU - Ishihara, R

N1 - harvest

PY - 2015

Y1 - 2015

U2 - 10.3791/53260

DO - 10.3791/53260

M3 - Article

SN - 1940-087X

VL - 106

SP - e53260-e53260

JO - Journal of Visualized Experiments

JF - Journal of Visualized Experiments

ER -