Fabrication of mechanical structures in p-type silicon using electrochemical etching

H Ohji, PJ French, K Tsutsumi

Research output: Contribution to journalArticleScientificpeer-review

31 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)254-258
Number of pages5
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume82
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

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