@inproceedings{d644a12e2cb340269c6a350e12998154,
title = "Fabrication of mechanical structures in p-type silicon using electrochemical etching",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "H Ohji and PJ French and K Tsutsumi",
year = "1999",
language = "Undefined/Unknown",
publisher = "Institute of Electrical Engineers of Japan",
pages = "1086--1089",
booktitle = "Transducers '99: digest of technical papers. Vol. 1",
note = "10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan ; Conference date: 07-06-1999 Through 10-06-1999",
}