Fabrication of mechanical structures in p-type silicon using electrochemical etching

H Ohji, PJ French, K Tsutsumi

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Transducers '99: digest of technical papers. Vol. 1
Place of Publication	Tokyo
Publisher	Institute of Electrical Engineers of Japan
Pages	1086-1089
Number of pages	4
Publication status	Published - 1999
Event	10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan - Tokyo Duration: 7 Jun 1999 → 10 Jun 1999

Name
Publisher	Institute of Electrical Engineers of Japan

Conference	10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan
Period	7/06/99 → 10/06/99

Keywords

@inproceedings{d644a12e2cb340269c6a350e12998154,

title = "Fabrication of mechanical structures in p-type silicon using electrochemical etching",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "H Ohji and PJ French and K Tsutsumi",

year = "1999",

language = "Undefined/Unknown",

publisher = "Institute of Electrical Engineers of Japan",

pages = "1086--1089",

booktitle = "Transducers '99: digest of technical papers. Vol. 1",

note = "null ; Conference date: 07-06-1999 Through 10-06-1999",

}

Transducers '99: digest of technical papers. Vol. 1. Tokyo : Institute of Electrical Engineers of Japan, 1999. p. 1086-1089.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Fabrication of mechanical structures in p-type silicon using electrochemical etching

AU - Ohji, H

AU - French, PJ

AU - Tsutsumi, K

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 1086

EP - 1089

BT - Transducers '99: digest of technical papers. Vol. 1

PB - Institute of Electrical Engineers of Japan

CY - Tokyo

Y2 - 7 June 1999 through 10 June 1999

ER -